The specific process of slit chip etching processing

Slit chip etching processing is a precision manufacturing technology, widely used in the field of microfabrication, such as microelectronics, nanotechnology, optical manufacturing and other fields. The following is the specific process of slit sheet etching processing:

1. Prepare the workpiece: select the substrate to be etched, which can be silicon, glass, metal or plastic. According to the need to design a good pattern, you can use photolithography technology to transfer the pattern to the workpiece.

2. Coating the protective layer: Coat the surface of the workpiece with a layer of resist, which can prevent the etching process on the part that does not need to be processed to cause damage. Resist can be liquid, gas or gel, depending on the specific needs of the choice.

3. Exposure: the mask with a pattern to cover the workpiece coated with resist, and then in the ultraviolet light or electron beam irradiation, so that the mask under the resist polymerization reaction.

4. Developing: the mask is removed from the workpiece, and then the resist without polymerization reaction is washed away with a solvent, this process is called developing. After this step, only the pattern part of the resist remains.

5. Etching: the workpiece into the etching machine, in the etching solution (such as acid, alkali, salt solution, etc.) under the action of the resist to protect the part of the workpiece is gradually corroded. This process needs to be based on the workpiece material and the type of etching solution to determine the time and temperature and other parameters.

6. Degumming: After the etching is completed, the residual resist on the surface of the workpiece to remove, in order to carry out the next operation. This step is usually completed using organic solvents or heat and other methods.

7. Inspection and correction: check the finished workpiece, if there is a need to correct the place, you can again etching or photolithography operations.

8. End: After completing all the checks and corrections, the slit chip etching process is over. This process can get high-precision microstructure, laying a good foundation for subsequent applications.

Slit sheet etching processing is a very precise manufacturing technology, which requires a high level of technology and strict process control to get high quality products. In the actual production, it also needs to pay attention to some issues, such as the selection and use of resist, the preparation and replacement of etching solution, the optimization and control of process parameters. Only by doing a good job in every aspect can we ensure the quality and precision of the final product.